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Gaseous detection device
The gaseous detection device-GDD is a method and apparatus for the detection of signals in the gaseous environment of an environmental scanning electron microscope (ESEM) and all scanned beam type of instruments that allow a minimum gas pressure for the detector to operate.
==History==
In the course of development of the ESEM, the detectors previously employed in the vacuum of a scanning electron microscope (SEM) had to be adapted for operation in gaseous conditions. The backscattered electron (BSE) detector was adapted by an appropriate geometry in accordance with the requirements for optimum electron beam transmission, BSE distribution and light guide transmission. However, the corresponding secondary electron (SE) detector (Everhart-Thornley detector) could not be adapted, because the high potential required would cause a catastrophic breakdown even with moderate increase of pressure, such as low vacuum. Danilatos (1983)〔Danilatos, G.D. (1983a) Gaseous detector device for an environmental electron probe microanalyzer. Research Disclosure No. 23311:284.〕 overcame this problem by using the environmental gas itself as the detector, by virtue of the ionizing action of various signals. With appropriate control of electrode configuration and bias, detection of SE was achieved. A comprehensive survey dealing with the theory and operation of GDD has been published,〔Danilatos, G.D. (1990) (Theory of the Gaseous Detector Device in the ESEM ). Advances in Electronics and Electron Physics, Academic Press, Vol. 78:1–102.〕 from which the majority of the material presented below has been used.
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